MEMS thermal gas flow sensor and its selection

Jun 28,2023


Introduction to Thermal Gas Flow Sensors

The thermal gas flow sensor is a type of sensor based on the principle of fluid heat transfer, which uses the thermal principle of MEMS to monitor the flow of the gas medium in the pipeline.

The flow chip is composed of two thermocouple stacks and a heating resistor. The thermocouple stacks are symmetrically distributed upstream and downstream of the heating resistors, and the thermal junctions of the heating resistors and the thermocouple stacks are located on an insulating base.

Introduction to Thermal Gas Flow Sensors

The heating resistor heats the hot junction of the thermocouple stack, and the temperature gradient between the hot and cold junctions of the thermocouple stack results in an output voltage. When the fluid is at rest, the temperature at the symmetrical positions on both sides of the heating resistor is the same. When the fluid flows from right to left, the isotherm slopes to the left, and the temperature at the symmetrical positions on both sides of the heating resistor is no longer the same, and the temperature difference can be measured by the thermocouple stack placed on both sides of the heating resistor.

Principle to Thermal Gas Flow Sensors

Since the heat transfer of the fluid is only related to the fluid mass and the heat capacity of the fluid, the sensor can directly measure the fluid mass flow.

Characteristics and application of thermal gas flow sensor

The thermal gas flow sensor uses a relatively simple structure to accurately measure the mass flow of gas. It has the advantages of simple structure, small pressure loss and wide measuring range. It has a wide range of applications in industrial process control, medical equipment, portable instruments, environmental monitoring equipment and other fields.

●New generation MEMS sensor chip technology

●High precision, fast response, good repeatability

●Accurately measure very small flow

●Fully calibrated and temperature compensated

Application field

Industrial Process Control

Particle Counter

Portable Instrument

Air Sampling/Analyzers

Industrial Process Control Particle Counter Portable Instrument Air Sampling/Analyzers
Ventilator

Disinfection machine

Oxygen Machine  Anesthesia Machine
Ventilator Disinfection machine Oxygen Machine Anesthesia Machine

Thermal gas flow sensor selection

Model FR03 FR03H FR06 FR15
Picture FR03 FR03H FR06 FR15
Conventional Range (SLM) 0.1/0.2/0.3/0.5 1/2/3/4/5 10/15/20 0-300
Diameter DN3 DN3 DN6 DN15
Output Method Linear 1-5V/0.5-4.5V Linear 1-5V/0.5-4.5V or digital IIC Linear Analog Voltage and Digital IIC
Operating Voltage DC5V-14V
Accuracy ±(2±0.5FS)%

0-9SLM  ±0.5SLM

9-300SLM  ±2.5%FS

Work Pressure customizable ≤200Kpa customizable /
Operating Temperature 0℃~50℃ 5℃~60℃
Storage Temperature -20℃~80℃
Measuring Medium dry clean non-corrosive gas
Electrical Interface 2.54mm-5P pin or PH2.0-5P terminal (optional) Molex 87832-1010
Mechanical Interface / ISO3mm φ6-G1/8 pneumatic plug /
Model FR20 F1012 F1031 F1031V
Picture FR20 F1012 F1031 F1031V
Conventional Range (SLM) 150/200/300

0.03/0.05/0.1/0.2/0.3/0.5/1

50/100/150/200/300 100/150/200/300
Diameter DN20 DN3 DN20 DN20
Output Method Linear 1-5V/0.5-4.5V or digital IIC Linear 1-5V/0.5-4.5V Linear 0.5-4.5V
Operating Voltage DC5V-14V DC7V-14V DC5V-14V
Accuracy ±(2±0.5FS)% ±2.5%FS ±4%FS
Work Pressure ≤200KPa
Operating Temperature 0℃~50℃
Storage Temperature -20℃~80℃
Measuring Medium dry clean non-corrosive gas
Electrical Interface PH2.0-5P terminal 2.54mm-5P pin PH2.0-5P terminal PH2.0-5P terminal
Mechanical Interface ISO20mm ISO3mm ISO20mm ISO20mm

 

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